World’s First | Gripper-Tip / Fingertip MEMS Miniature Six-Axis Force Sensor Enters Mass Production — The Global Embodied AI Industry Welcomes a Force-Tactile Revolution!
“The industry calls 2026 the inaugural year of robotic tactile sensing.” FocusOne Micro has launched the world’s first — and only — series of gripper-tip / fingertip MEMS miniature six-axis force sensors capable of true six-axis force measurement!
01/03 Industry Pain Points
Conventional metal-strain-gauge six-axis force sensors are too bulky for miniaturized products, while electronic skins are compact but primarily provide pressure distribution — forces in the remaining directions are “inferred” by algorithms rather than measured as true contact values.
1.1 Six-axis force sensors based on metal foil strain gauges are bulky and ill-suited to miniaturized products
Conventional foil-strain-gauge six-axis force sensors typically have diameters of 40 mm or more. Robot grippers and fingertips are extremely compact, and because a single metal foil strain gauge is too large (> 7 mm²), it is impossible to bond 12 or more gauges onto such a small structure.
1.2 Electronic skins are compact, but provide only pressure-array distribution; tangential forces are “inferred” rather than true values, and no torque is available
Electronic skins capture contact shape, not force magnitude. Across the various technical routes (optical, magnetoelectric, piezoelectric, capacitive, etc.), they primarily provide normal-pressure (Fz) distribution; forces in the other directions are “inferred” by algorithms rather than measured as raw contact values — there is no tangential force (Fx, Fy) and no torque (Mx, My, Mz). In essence, all of them use algorithms to “translate” tactile signals: the output is an “inferred value” derived through multiple algorithmic conversions, not the “raw value” produced directly by physical contact. Hall elements in magnetic tactile sensing are sensitive to electromagnetic fields, and the optical systems of vision-based tactile sensing are sensitive to oil and dust.
02/03 Our World-First Innovation
We are the first in the world to achieve true six-axis force measurement with MEMS silicon strain-gauge technology and to output combined force vectors — with technical specifications that comprehensively outperform electronic skin.
2.1 Miniaturization via MEMS silicon strain gauges; consistency and reliability ensured by glass micro-fusion bonding
New strain gauges: proprietary MEMS silicon strain gauges replace metal foil strain gauges. Under the same strain they deliver a far stronger signal, and each die occupies only 1/40 the area of a foil gauge — allowing six or more sets of sensing elements to be arranged in a tiny footprint and enabling full six-axis force decoupling.
| Silicon Strain Gauge · Sensing Layer | ||
| 1/40 Chip area compared with metal foil strain gauges | 10 kΩ Resistance: 300–400 Ω (metal foil strain gauge) | 100 倍 Sensitivity compared with conventional metal foil strain gauges |
| Area, resistance, and sensitivity are benchmarked against same-spec metal foil strain gauges; power dissipation is computed using P = V²/R. | ||
New bonding process: the strain gauges are fused onto the elastic element by glass micro-fusion bonding. High-temperature molten glass powder forms a dense, inorganic glass structure that replaces the adhesive layer — which ages, creeps, and softens with temperature. With no time-varying intermediary in the force-transmission path, the zero point does not drift over time.
| Glass Micro-Fusion · Manufacturing Layer | ||
| 0 Organic adhesive layer | Glass interface In contrast to adhesive bonding | batch-to-batch consistency Process deviations corrected by calibration |
| No adhesive layer between the strain gauge and the elastic element | ||
2.2 Technical force-measurement specifications that comprehensively outperform electronic skin
True six-axis force, high accuracy, high resolution: designed for robotic grippers, fingertips and similar applications, the MEMS silicon-strain miniature six-axis force sensor directly outputs true values of Fx/Fy/Fz and Mx/My/Mz. Unlike electronic-skin tactile arrays, which rely on algorithms to back-calculate tangential forces and moments, this product offers 1–3% FS measurement accuracy and 0.01 N high resolution. The metal elastic element exhibits virtually no creep, and static drift can be quickly compensated by zeroing.
Simple to use, high dynamic response, high reliability: every unit is fully calibrated at the factory — users need only perform a simple zeroing operation, with no recalibration required. The dynamic response ranges from hundreds of Hz to several kHz, accurately capturing high-speed impacts and transient force signals. With only six output channels, the data volume is small, easing the compute burden on the controller. Built on silicon strain gauges plus the glass micro-fusion bonding process, the sensor achieves tens of millions of durability cycles — vastly superior to the tens of thousands of cycles typical of electronic skin — with minimal aging-related degradation. It directly measures shear and friction forces with high precision, features controllable cross-axis coupling, and is minimally affected by mounting conditions, providing highly reliable six-axis force perception for robotic grasping and force-controlled interaction.
2.3 Three mass-production series: F6-010 / F6-015 / F6-020 — meeting every requirement
To meet diverse measurement requirements, three mass-production series are offered with different diameters (heights) and force/torque ranges: F6-010 / F6-015 / F6-020. All three series share the same MEMS silicon strain gauge, manufacturing process, and software algorithms, differing only in diameter and torque range. The F6-010 is the thinnest, at only 3 mm in height. After signal sampling and on-board algorithm processing, the sensor outputs digital data via TTL/RS-485 protocols.
Even smaller products are under development — stay tuned!
03/03 Live Demos: Real-Time Six-Axis Force Tactile Feedback for Wiping, Plugging, Grasping, and Pinching
Two F6-020-050 miniature six-axis force sensors were embedded in the gripper tips of the open-source UMI data-collection device, and four scenarios were filmed live: 1) erasing a blackboard, 2) wiping a table with a cloth, 3) plugging and unplugging a charger, and 4) grasping a water bottle. The sensor surface features a built-in, high-friction black silicone pad, and outputs six-axis force data in real time at a 1 kHz sampling rate.
3.1 One motion, six force directions
Take wiping a table as an example: three things happen simultaneously within a single action: within a single motion, three things happen simultaneously — the normal force pressing on the table must remain constant; the tangential force reverses as the cloth is pushed forward and pulled back; and when the cloth changes direction, a torque about the vertical axis appears. These quantities cannot be separated within the same motion — if only normal pressure is measured, it is impossible to tell “whether the press was too heavy or the push too abrupt.” Only when tangential forces and torque components are output simultaneously can the action be executed and fed back accurately. Real-time force and torque outputs also facilitate model training, allowing the model not only to “see,” but to feel precisely and respond quickly.
3.2 Typical application scenarios
Wherever post-contact judgment is required, this segment of force data comes into play:
- Data-collection devices (UMI): adding force-tactile sensing to imitation learning, so policies truly learn “how much is too much.”
- Humanoid dexterous hands: the smallest model fits inside a fingertip cavity, with grasping force read out in real time.
- Humanoid robot grippers: force-controlled assembly and collision avoidance; flexible machine loading/unloading without trial-and-error.
- Teleoperation and teaching: force feedback transmitted to the operator, so remote work can truly be “felt.”
- Precision assembly and inspection: detection of plug-in and press-fit seating, replacing experience-based judgment.
- Rehabilitation assistive devices: contact-force limits can be set, leaving a safety margin for human–machine contact.
For the final precise execution of robotic tasks, perception must come from the very end of the gripper or dexterous hand. High-precision six-axis force sensing will drive the industry’s development and usher in a new tactile revolution. FocusOne Micro remains committed to technological innovation and looks forward to working with partners across the industry chain to advance embodied AI. Real-world data should never be visual-only. Miniature MEMS six-axis force sensors bring “fingertip force-tactile sensing” to data-collection devices, grippers, and dexterous hands.









