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Industrial MEMS six-dimensional force sensor

As the core tactile component of industrial robots, the company’s MEMS six-dimensional force sensor solves the drawbacks of traditional sensors—large size, high cost, hard mass production, and low environmental adaptability. It enables precise operation, flexible interaction, and large-scale deployment for industrial robots, becoming a key part for high-precision, flexible intelligent manufacturing.

Our products are widely used in robot force feedback, industrial precision inspection, medical device force control, and consumer electronics touch control.

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Product Advantages

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    High precision

    Relying on the high strain transmission efficiency of the glass micro-melting layer.

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    High sensitivity

    It is a hundred times more sensitive than traditional metal strain gauges.

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    Long-term stability and reliability

    Inorganic bonding, creep resistance, aging resistance, corrosion protection

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    Strong mass production capability

    Automated production, reducing human error.

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    Excellent temperature characteristics

    Good thermal expansion coefficient matching, Low temperature drift

Product Parameters

IndicatorParameter
Model numberF6-400-075
Rated Load400 N
Overload Level500%FS
Sampling Frequency1000HZ
Communication ProtocolRS422/RS485/Ethercat
Repeatability Accuracy0.1%FS
Accuracy0.5%FS
MaterialHigh-Strength Metal Composite
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